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Development of Ultra-Soft X-ray Spectrometer for Electron Probe Microanalysis

Published online by Cambridge University Press:  31 July 2006

S Fukushima ,
T Kimura ,
T Ogiwara ,
K Tsukamoto ,
T Tazawa  and
S Tanuma
S Fukushima
Affiliation:
National Institute for Materials Science
T Kimura
Affiliation:
National Institute for Materials Science
T Ogiwara
Affiliation:
National Institute for Materials Science
K Tsukamoto
Affiliation:
JEOL
T Tazawa
Affiliation:
JEOL
S Tanuma
Affiliation:
National Institute for Materials Science
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Type
Research Article
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 58 - 59
Copyright
© 2006 Microscopy Society of America

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