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Edx Spectrum Imaging of Bulk Specimens: Its Role in Quantitative X-Ray Microanalysis

Published online by Cambridge University Press:  02 July 2020

I.M. Anderson
I.M. Anderson*
Affiliation:
Metals & Ceramics Division, Oak Ridge National Laboratory, MS-6136, PO Box 2008, Oak Ridge, TN, 37831-6136
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Abstract

Energy-dispersive X-ray (EDX) spectrum imaging, where a full spectrum is acquired at each pixel in a rastered image, combines the advantages of imaging and analysis for quantitative compositional mapping. This method has great advantages for the analysis of compositional variations, because the contrast inherent in EDX spectrum images arises from the distinctiveness of the characteristic X-ray spectra in various regions of the surveyed microstructure. EDX spectrum imaging provides for simultaneous spatial, spectral and temporal resolution of the X-rays emitted from the specimen. Many EDX manufacturers have incorporated a spectrum imaging capability within their acquisition and analysis software, and ongoing improvements in computing power will enhance the practicality of spectrum imaging methods, in particular the acquisition, manipulation and analysis of the large raw data files that are generated with this method. This paper surveys the potential role of spectrum imaging in tasks that support true quantitative X-ray microanalysis of bulk specimens: robust qualitative analysis, the construction of representative spectra that describe the specimen, and the extraction of elemental concentrations from the representative spectra.

Type
Quantitative X-Ray Microanalysis in the Microprobe, in the SEM and in the ESEM:Theory and Practice (Organized by R. Gauvin and E. Lifshin)
Information
Microscopy and Microanalysis , Volume 7 , Issue S2: Proceedings: Microscopy & Microanalysis 2001, Microscopy Society of America 59th Annual Meeting, Microbeam Analysis Society 35th Annual Meeting, Long Beach, California August 5-9, 2001 , August 2001 , pp. 704 - 705
Copyright
Copyright © Microscopy Society of America 2001

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