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Effects of Preheat Supply on Embossed Pattern Depth in Roll-to-Roll Process

Published online by Cambridge University Press:  27 August 2014

Seyoung Kim ,
Youngsu Son ,
Heechang Park ,
Cheolhoon Park  and
Dongwon Yun
Seyoung Kim
Affiliation:
Department of Robotics and Mechatronics, Korea Institute of Machinery & Materials (KIMM), Daejeon, South Korea
Youngsu Son
Affiliation:
Department of Robotics and Mechatronics, Korea Institute of Machinery & Materials (KIMM), Daejeon, South Korea
Heechang Park
Affiliation:
Department of Robotics and Mechatronics, Korea Institute of Machinery & Materials (KIMM), Daejeon, South Korea
Cheolhoon Park
Affiliation:
Department of Robotics and Mechatronics, Korea Institute of Machinery & Materials (KIMM), Daejeon, South Korea
Dongwon Yun
Affiliation:
Department of Robotics and Mechatronics, Korea Institute of Machinery & Materials (KIMM), Daejeon, South Korea

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 1488 - 1489
Copyright
Copyright © Microscopy Society of America 2014 

References

References:

[1] Yeo, L.P., et al., Microelectronic Engineering, 86 (2009) p. 933.Google Scholar
[2] Schulz, H., et al., Microelectronic Engineering, 67-68 (2003) p. 657.Google Scholar
This research was supported by the research fund of the Korea Institute of Machinery & ontribution to data collection.Google Scholar