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Efficient Target Preparation by Combined Pulsed Laser Ablation and FIB Milling

Published online by Cambridge University Press:  08 April 2017

H Stegmann
Affiliation:
Carl Zeiss NTS GmbH, Germany
H Dömer
Affiliation:
Carl Zeiss NTS GmbH, Germany
R Rosenkranz
Affiliation:
Fraunhofer Institute for Non-Destructive Testing, Germany
E Zschech
Affiliation:
Fraunhofer Institute for Non-Destructive Testing, Germany

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Copyright
Copyright © Microscopy Society of America 2011