Hostname: page-component-848d4c4894-m9kch Total loading time: 0 Render date: 2024-05-19T05:14:57.322Z Has data issue: false hasContentIssue false
  • English
  • Français

Electrical Probing and Current Imaging for Failure Analysis in the SEM/FIB

Published online by Cambridge University Press:  23 September 2015

Stephan Kleindiek ,
Andreas Rummel ,
Klaus Schock ,
Gregor Renka  and
Matthias Kemmler
Stephan Kleindiek
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
Andreas Rummel
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
Klaus Schock
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
Gregor Renka
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
Matthias Kemmler
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 169 - 170
Copyright
Copyright © Microscopy Society of America 2015