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Electron Probe Microanalysis of Thin Films and Multilayers Using the Computer Program XFILM

Published online by Cambridge University Press:  24 December 2009

Xavier Llovet  and
Claude Merlet
Xavier Llovet*
Affiliation:
Serveis Cientificotècnics, Universitat de Barcelona, Lluís Solé i Sabarís 1-3, 08028 Barcelona, Spain
Claude Merlet
Affiliation:
CNRS UMR 5243, Geosciences Montpellier, Université de Montpellier II, Sciences et Techniques du Languedoc, Pl. E. Bataillon, 34095 Montpellier Cedex 5, France
*
Corresponding author. E-mail: xavier@sct.ub.es
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Abstract

XFILM is a computer program for determining the thickness and composition of thin films on substrates and multilayers by electron probe microanalysis. In this study, we describe the X-ray emission model implemented in the latest version of XFILM and assess its reliability by comparing measured and calculated k-ratios from thin-film samples available in the literature. We present and discuss examples of applications of XFILM that illustrate the capabilities of the program.

Keywords

EPMAthin-film analysisX-ray emissionthickness determination
Type
Thick and Thin Films: Standards and Analysis
Information
Microscopy and Microanalysis , Volume 16 , Issue 1 , February 2010 , pp. 21 - 32
Copyright
Copyright © Microscopy Society of America 2010

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