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Elemental Mapping of Materials Using Omega Filter and Imaging Plate

Published online by Cambridge University Press:  02 July 2020

Y. Ikematsu ,
D. Shindo ,
T. Oikawa  and
M. Kersker
Y. Ikematsu
Affiliation:
Institute for Advanced Materials Processing, Tohoku University, Sendai, 980-8577, Japan
D. Shindo
Affiliation:
Institute for Advanced Materials Processing, Tohoku University, Sendai, 980-8577, Japan
T. Oikawa
Affiliation:
JEOL Ltd, Akishima, Tokyo, 196-0021, Japan
M. Kersker
Affiliation:
JEOL USA Inc., 11 Dearborn Road, Peabody, MA, 01960
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Extract

Elemental microanalysis has been important in materials characterization, since the elemental distribution strongly affects the property of various materials. A recently developed post-column energy filter coupled with a slow scan CCD camera makes it possible to carry out elemental mapping with a transmission electron microscope. Here, we develop the elemental mapping technique utilizing the omega filter and imaging plates (3760x3000 pixels). Since the data obtained from the imaging plates consist of a large number of pixels, fine and detailed elemental analysis will be expected.

Energy-filtered images were obtained by a JEM-2010 electron microscope installed with an omega-type energy filter, and they were recorded on imaging plates (FDL-UR-V:25 μm/pixel). The width of an energy-selecting slit was set to be 20 eV. Elemental maps were obtained from the energy-filtered images using the three window technique. Special care was taken to reduce the image shifts among the three filtered images used in the three-window method.

Type
Electron Energy-Loss Spectroscopy (EELS) and Imaging
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 216 - 217
Copyright
Copyright © Microscopy Society of America

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References

1.Crozier, P. A., Ultramicroscopy 58 (1995) 157.CrossRefGoogle Scholar
2.Egerton, R. F., Electron Energy Loss Spectroscopy in the Electron Microscope, 2nd edition, New York, Plenum Press (1996) 272.CrossRefGoogle Scholar