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ELNES and EDS Mapping in HfOxNy Thin Films and AlN/TiN Superlattices

Published online by Cambridge University Press:  01 August 2004

Martin Couillard ,
M-S Lee ,
Dolf Landheer ,
Vladimir V. Pankov ,
Robert H. Prince  and
Gianluigi A. Botton
Martin Couillard
Affiliation:
McMaster University, Canada
M-S Lee
Affiliation:
University of Toronto,Canada
Dolf Landheer
Affiliation:
National Research Council of Canada
Vladimir V. Pankov
Affiliation:
York University, Canada
Robert H. Prince
Affiliation:
York University, Canada
Gianluigi A. Botton
Affiliation:
McMaster University, Canada
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 308 - 309
Copyright
© 2004 Microscopy Society of America

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