Hostname: page-component-848d4c4894-pftt2 Total loading time: 0 Render date: 2024-05-14T18:44:11.035Z Has data issue: false hasContentIssue false
  • English
  • Français

Evaluation method of image resolution for the aberration-corrected STEM

Published online by Cambridge University Press:  30 July 2021

Yasuhiko Sugigaki ,
Yoshifumi Taniguchi ,
Yudai Kubo ,
Kuniyasu Nakamura ,
Susumu Koyama  and
Mitsugu Sato
Yasuhiko Sugigaki
Affiliation:
Hitachi High-Tech Corporation, Hitachinaka-shi, Ibaraki, Japan
Yoshifumi Taniguchi
Affiliation:
Hitachi High-Tech Corporation, Hitachinaka-shi, Ibaraki, Japan
Yudai Kubo
Affiliation:
Hitachi High-Tech Corporation, Hitachinaka-shi, Ibaraki, Japan
Kuniyasu Nakamura
Affiliation:
Hitachi High-Tech Corporation, Hitachinaka-shi, Ibaraki, Japan
Susumu Koyama
Affiliation:
Hitachi High-Tech Corporation, Hitachinaka-shi, Ibaraki, Japan
Mitsugu Sato
Affiliation:
Hitachi High-Tech Corporation, Hitachinaka-shi, Ibaraki, Japan

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Advances in Analytical STEM-in-SEM
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 1594 - 1595
Check for updates
Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Jesson, D.E. and Pennycook, S.J.: Proc. Roy. Soc. Lond., A441, 26 (1993).Google Scholar
[2] Nakamura, K., Kakibayashi, H., Kanehori, K. and Tanaka, N., Journal of Electron Microscopy 1, 33 (1997).CrossRefGoogle Scholar