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Focused Ion Beams for Imaging, Analysis, and Fabrication - Where Did They Come From and Where are They Going?

Published online by Cambridge University Press:  04 August 2017

John Notte*
Affiliation:
Carl Zeiss Microscopy, Ion Microscopy Innovation Center, Peabody, MA 01960, USA

Abstract

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Type
Abstract
Copyright
© Microscopy Society of America 2017 

References

[1] Feynman, Richard P. Caltech Engineering and Science 23(5 Feb. (1960). pp 2236.Google Scholar
[2] Melmed, Allan J. Applied Surface Science 94/95 1996). pp 1725.CrossRefGoogle Scholar