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Formation of Dynamic Topographic Patterns During Electron Beam Induced Etching of Diamond

Published online by Cambridge University Press:  04 August 2017

Aiden A. Martin ,
Alan Bahm ,
James Bishop ,
Igor Aharonovich  and
Milos Toth
Aiden A. Martin
Affiliation:
Lawrence Livermore National Laboratory, Livermore, California, USA.
Alan Bahm
Affiliation:
FEI Company, 5350 Northeast Dawson Creek Drive, Hillsboro, Oregon, USA.
James Bishop
Affiliation:
School of Physics and Advanced Materials, University of Technology, Sydney, 15 Broadway, Ultimo, New South Wales 2007, Australia.
Igor Aharonovich
Affiliation:
School of Physics and Advanced Materials, University of Technology, Sydney, 15 Broadway, Ultimo, New South Wales 2007, Australia.
Milos Toth
Affiliation:
School of Physics and Advanced Materials, University of Technology, Sydney, 15 Broadway, Ultimo, New South Wales 2007, Australia.

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 2264 - 2265
Copyright
© Microscopy Society of America 2017 

References

[1] Cross, MC & Hohenberg, PC Rev. Mod. Phys. 65 1993.Google Scholar
[2] Martin, AA, et al, Phys. Rev. Lett. 115 2015.Google Scholar
[3] Utke, I, Moshkalev, S & Russell, P in Nanofabrication Using Focused Ion and Electron Beams: Principles and Applications. Oxford University Press New York 2012.Google Scholar
[4] A portion of this work was funded by FEI Company and the Australian Research Council (Project Number DP140102721). A portion of this work was performed under the auspices of the U.S. DOE by LLNL under Contract DE-AC52-07NA27344. I.A. is the recipient of an Australian Research Council Discovery Early Career Research Award (Project Number DE130100592).Google Scholar