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Imaging with STEM Detector, Experiments vs. Simulation

Published online by Cambridge University Press:  28 September 2015

F. Mika ,
C.G.H. Walker ,
I. Konvalina  and
I. Müllerová
F. Mika
Affiliation:
Institute of Scientific Instruments of the ASCR, v.v.i., Královopolská 147, 612 64 Brno, Czech Republic.
C.G.H. Walker
Affiliation:
Institute of Scientific Instruments of the ASCR, v.v.i., Královopolská 147, 612 64 Brno, Czech Republic.
I. Konvalina
Affiliation:
Institute of Scientific Instruments of the ASCR, v.v.i., Královopolská 147, 612 64 Brno, Czech Republic.
I. Müllerová
Affiliation:
Institute of Scientific Instruments of the ASCR, v.v.i., Královopolská 147, 612 64 Brno, Czech Republic.

Abstract

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Type
Electron Optics
Information
Microscopy and Microanalysis , Volume 21 , Supplement S4: Proceedings Ninth International Conference on Charged Particle Optics , June 2015 , pp. 66 - 71
Copyright
Copyright © Microscopy Society of America 2015 

References

[1]Pennycook, SJ & Nellist, PD in Scanning Electron Microscopy - Imaging and Analysis. Springer, Berlin).Google Scholar
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[3]Kieft, E & Bosch, E, J. Phys. D: Appl. Phys. 41 (2008), 215310.CrossRefGoogle Scholar
[4]Zlamal, J & Lencova, B, Nucl. Instrum. Meth. A 645 (2011), p. 278.CrossRefGoogle Scholar
[5] The work is supported by the TA CR (TE01020118), MEYS CR (LO1212), its infrastructure by MEYS CR and EC (cZ.1.05/2.1.00/01.0017) and by ASCR (RVO:68081731). The authors would like to thank L. Frank and V. Krzyzanek for useful discussions and to A. Patak for his assistance with the experiments..Google Scholar