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Improvement of TEM-EELS and Its Application for Materials in Semiconductor Devices

Published online by Cambridge University Press:  31 July 2006

K Kimoto ,
K Ishizuka  and
Y Matsui
K Kimoto
Affiliation:
National Institute for Materials Science
K Ishizuka
Affiliation:
National Institute for Materials Science
Y Matsui
Affiliation:
National Institute for Materials Science
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Type
Research Article
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 106 - 107
Copyright
© 2006 Microscopy Society of America

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