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In situ TEM Investigation of electrical Current Effect on Aluminum Interconnect

Published online by Cambridge University Press:  08 April 2017

D Xie  and
Z Shan
D Xie
Affiliation:
Xian Jiaotong University
Z Shan
Affiliation:
Xian Jiaotong University

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 17 , Supplement S2 , July 2011 , pp. 1348 - 1349
Copyright
Copyright © Microscopy Society of America 2011