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In-Column Energy Filtering Transmission Electron Microscope (EFTEM) - Integrated Analysis of Energy Loss Signals
Published online by Cambridge University Press: 02 July 2020
Extract
In an EFTEM the full range of signals generated by interaction of the primary electron beam with the specimen can be detected. Thus operating such a system and generating combined digital information usually is a rather complex issue. The demands of the users on the other hand are to achieve results fast, easily and reproducibly. Moreover it should be possible to tailor the integral system according to dedicated needs. In general it should be no problem to use modern digital equipment and just let an integral computer control everything. However, in order to make such digital settings really useful, there should be no D/A conversion in between the data paths of the microscope because any analogue system tends to drift and the changes of lens parameters between different modes of operation should be minimised to overcome hysteresis. Fully digitised in-column EFTEMs like the LEO EFTEMs with OMEGA filter and Koehler illumination including also multiple parallel and serial remote capabilities provide optimum preconditions to fulfil the demands.
- Type
- Analytical Electron Microscopy
- Information
- Microscopy and Microanalysis , Volume 3 , Issue S2: Proceedings: Microscopy & Microanalysis '97, Microscopy Society of America 55th Annual Meeting, Microbeam Analysis Society 31st Annual Meeting, Histochemical Society 48th Annual Meeting, Cleveland, Ohio, August 10-14, 1997 , August 1997 , pp. 999 - 1000
- Copyright
- Copyright © Microscopy Society of America 1997