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In-Column Energy Filtering Transmission Electron Microscope (EFTEM) - Integrated Analysis of Energy Loss Signals

Published online by Cambridge University Press:  02 July 2020

R. Bauer
Affiliation:
LEO Elektronenmikroskopie GmbH, D - 73446Oberkochen, Germany
G. Benner
Affiliation:
LEO Elektronenmikroskopie GmbH, D - 73446Oberkochen, Germany
P. Büscher
Affiliation:
Soft-Imaging Software GmbH, D-48153Münster, Germany
W. Probst
Affiliation:
LEO Elektronenmikroskopie GmbH, D - 73446Oberkochen, Germany
V. Seybold
Affiliation:
LEO Elektronenmikroskopie GmbH, D - 73446Oberkochen, Germany
E. Zellmann
Affiliation:
LEO Elektronenmikroskopie GmbH, D - 73446Oberkochen, Germany
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Extract

In an EFTEM the full range of signals generated by interaction of the primary electron beam with the specimen can be detected. Thus operating such a system and generating combined digital information usually is a rather complex issue. The demands of the users on the other hand are to achieve results fast, easily and reproducibly. Moreover it should be possible to tailor the integral system according to dedicated needs. In general it should be no problem to use modern digital equipment and just let an integral computer control everything. However, in order to make such digital settings really useful, there should be no D/A conversion in between the data paths of the microscope because any analogue system tends to drift and the changes of lens parameters between different modes of operation should be minimised to overcome hysteresis. Fully digitised in-column EFTEMs like the LEO EFTEMs with OMEGA filter and Koehler illumination including also multiple parallel and serial remote capabilities provide optimum preconditions to fulfil the demands.

Type
Analytical Electron Microscopy
Copyright
Copyright © Microscopy Society of America 1997

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