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In-Situ Quantification of TEM Lamella Thickness and Ga Implantation in the FIB

Published online by Cambridge University Press:  27 August 2014

Matthew Hiscock ,
Michael Dawson ,
Christian Lang ,
Cheryl Hartfield  and
Peter Statham
Matthew Hiscock
Affiliation:
Oxford Instruments NanoAnalysis, Halifax Road, High Wycombe, HP12 3SE, UK
Michael Dawson
Affiliation:
Oxford Instruments NanoAnalysis, 10410 Miller Rd., Dallas, TX 75238
Christian Lang
Affiliation:
Oxford Instruments NanoAnalysis, Halifax Road, High Wycombe, HP12 3SE, UK
Cheryl Hartfield
Affiliation:
Oxford Instruments NanoAnalysis, 10410 Miller Rd., Dallas, TX 75238
Peter Statham
Affiliation:
Oxford Instruments NanoAnalysis, Halifax Road, High Wycombe, HP12 3SE, UK

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 342 - 343
Copyright
Copyright © Microscopy Society of America 2014 

References

References:

Hall, A. R. Microscopy and Microanalysis 19 (2013), p. 740.Google Scholar
Golla-Schindler, U. Conference Proceedings EMC (2008), p 667.Google Scholar
Lang, C. et al. Microscopy and Microanalysis 19 (2013), p. 1872.Google Scholar