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In-Situ TEM Investigation of Controlled VLS Silicon Nanowire Device Formation and Characterization

Published online by Cambridge University Press:  21 December 2016

S.B. Alam ,
F. Panciera ,
M.M Norton ,
O. Hansen ,
F.M. Ross  and
K. Mølhave
S.B. Alam
Affiliation:
Dept. of Micro and Nanotechnology, Technical University of Denmark (DTU), Denmark
F. Panciera
Affiliation:
IBM Research Division, T. J. Watson Research Center, Yorktown Heights, NY, USA Dept. of Engineering, University of Cambridge, Cambridge, United Kingdom
M.M Norton
Affiliation:
Dept. of Mechanical Engineering and Applied Mechanics, University of Pennsylvania, PA, USA
O. Hansen
Affiliation:
Dept. of Micro and Nanotechnology, Technical University of Denmark (DTU), Denmark Dept. of Mechanical Engineering and Applied Mechanics, University of Pennsylvania, PA, USA
F.M. Ross
Affiliation:
IBM Research Division, T. J. Watson Research Center, Yorktown Heights, NY, USA
K. Mølhave*
Affiliation:
Dept. of Micro and Nanotechnology, Technical University of Denmark (DTU), Denmark
*
*krmo@nanotech.dtu.dk.

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S5: Conference on In Situ and Correlative Electron Microscopy (CISCEM 2016) , November 2016 , pp. 60 - 61
Copyright
© Microscopy Society of America 2016 

References

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[2] Molhave, K., et al, Small vol. 4 Oct. 2008). pp. 1741–1746.Google Scholar
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[4] Kallesøe, C., et al, Nano Letters vol. 12 Jun. 2012). pp. 2965–2970.Google Scholar
[5] Alam, S.B., et al, Nano Letters vol. 15 Oct. 2015). pp. 6535–6541.Google Scholar
[6] Panciera, F., et al, Nature Communications 7, 12271. doi: 10.1038/ncomms12271 2016.CrossRefGoogle Scholar
[7] Supported by ERC Grant 279342: InSituNANO and EPSRC Grant EP/P005152/1 (F.P., S.H.), by the National Science Foundation CBET 1066573 and the Nano/Bio Interface Center through the National Science Foundation NSEC DMR08-32802 (M.M.N.), and The Danish Council for Independent Research, Case No.10-083797 (S.B.A., K.M.). The authors acknowledge Jerry D. Tersoff and Haim H. Bau for fruitful discussions and Mark C. Reuter, Arthur W. Ellis and Eric Jensen for technical support.Google Scholar