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Laser-Assisted Atom Probe Tomography of Oxide Materials

Published online by Cambridge University Press:  11 April 2007

Christian Oberdorfer ,
Patrick Stender ,
Christoph Reinke  and
Guido Schmitz
Christian Oberdorfer
Affiliation:
Institut für Materialphysik, Universität Münster, Wilhelm-Klemm-Straße 10, D-48149 Münster, Germany
Patrick Stender
Affiliation:
Institut für Materialphysik, Universität Münster, Wilhelm-Klemm-Straße 10, D-48149 Münster, Germany
Christoph Reinke
Affiliation:
Institut für Materialphysik, Universität Münster, Wilhelm-Klemm-Straße 10, D-48149 Münster, Germany
Guido Schmitz
Affiliation:
Institut für Materialphysik, Universität Münster, Wilhelm-Klemm-Straße 10, D-48149 Münster, Germany
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Abstract

Atom probe tomography provides a chemical analysis of nanostructured materials with outstanding resolution. However, due to the process of field evaporation triggered by nanosecond high voltage pulses, the method is usually limited to conductive materials. As part of recent efforts to overcome this limitation, it is demonstrated that the analysis of thick NiO and WO3 oxide layers is possible by laser pulses of 500 ps duration. A careful analysis of the mass spectra demonstrates that the expected stoichiometries are well reproduced by the measurement. The reconstruction of lattice planes proves that surface diffusion is negligible also in the case of thermal pulses.

Keywords

laser-assisted atom probe tomographycompositional analysistungsten oxidenickel oxidethermal pulsingthin filmsfield-induced oxidation
Type
MATERIALS APPLICATIONS
Information
Microscopy and Microanalysis , Volume 13 , Issue 5 , October 2007 , pp. 342 - 346
Copyright
© 2007 Microscopy Society of America

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References

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