Hostname: page-component-848d4c4894-wzw2p Total loading time: 0 Render date: 2024-05-06T11:44:52.043Z Has data issue: false hasContentIssue false
  • English
  • Français

Microreactor for Clean and Controlled In-situ SEM Imaging of CVD Processes

Published online by Cambridge University Press:  30 July 2020

Libor Novak ,
Petr Wandrol  and
Ernst Jan R. Vesseur
Libor Novak
Affiliation:
Thermo Fisher Scientific, Brno, Jihomoravsky kraj, Czech Republic
Petr Wandrol
Affiliation:
Thermo Fisher Scientific, Brno, Jihomoravsky kraj, Czech Republic
Ernst Jan R. Vesseur
Affiliation:
Thermo Fisher Scientific, Eindhoven, Noord-Brabant, Netherlands

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Approaching Operando Imaging of Functional Materials
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 1144 - 1145
Check for updates
Copyright
Copyright © Microscopy Society of America 2020

References

Wang, Z., Dong, J., Cui, Y., et al. Stacking sequence and interlayer coupling in few-layer graphene revealed by in situ imaging. Nat Commun 7, 13256 (2016). https://doi.org/10.1038/ncomms13256CrossRefGoogle ScholarPubMed
Novak, L., Kolibal, M., Wu, M., Wandrol, P., & Vystavel, T. Control and in-situ imaging of heat & gas mediated processes in FIB/SEM system. Microscopy and Microanalysis, 24(S1), 808–809 (2018). doi:10.1017/S1431927618004531CrossRefGoogle Scholar
Wang, Z., Dong, J., Li, L. et al. The coalescence behavior of two-dimensional materials revealed by multiscale in situ imaging during chemical vapour deposition growth. ACS Nano 2020 just accepted. https://doi.org/10.1021/acsnano.9b08221Google Scholar
Wang, Z., Weinberg, G., Zhang, Q. et al. Direct observation of graphene growth and associated copper substrate dynamics by in situ scanning electron microscopy. ACS Nano 2015, 9 (2), 1506–1519. https://doi.org/10.1021/nn5059826CrossRefGoogle ScholarPubMed
https://www.youtube.com/watch?v=GmIfGMcTsn0&list=PLhJ74CQiOr7bGhmkU2zOKMP-XXOhnLhOBGoogle Scholar
Mele, L. et al. A MEMS-based heating holder for the direct imaging of simultaneous in-situ heating and biasing experiments in scanning/transmission electron microscopes. Microscopy Research and Technique 79 (2016) p. 239. https://doi.org/10.1002/jemt.22623CrossRefGoogle ScholarPubMed