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Monte Carlo Modeling of Ion Beam Induced Secondary Electrons

Published online by Cambridge University Press:  27 August 2014

U. Huh ,
W. Cho ,
R. Ramachandra  and
D. C. Joy
U. Huh
Affiliation:
Material Science and Engineering, University of Tennessee, Knoxville, TN 37996-2200, USA
W. Cho
Affiliation:
Electrical and Computer Engineering, University of Tennessee, Knoxville, TN 37996-2100, USA
R. Ramachandra
Affiliation:
National Center for Microscopy and Imaging Research, University of California San Diego, La Jolla, CA 92093-0608, USA
D. C. Joy
Affiliation:
Material Science and Engineering, University of Tennessee, Knoxville, TN 37996-2200, USA Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 302 - 303
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Ziegler., J. F. (2013). PARTICLE INTERACTIONS WITH MATTER. Available: http://www.srim.org/.Google Scholar
[2] Berger, M. J., Coursey, J. S. & Zucker, M. A., and Chang., J. (2011). Stopping-Power and Range Tables for Electrons, Protons, and Helium Ions. Available: http://www.nist.gov/pml/data/star/index.cfm.Google Scholar
[3] This works was partially supported by the Center for Materials Processing at the University of Tennessee.Google Scholar