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Nano-Sculpting of Suspended CVD Graphene with Helium and Neon Ion Beams

Published online by Cambridge University Press:  23 September 2015

D.A. Cullen
Affiliation:
Materials Science & Technology Division, ORNL, Oak Ridge, TN 37831-6064USA
J. Swett
Affiliation:
Lockheed Martin Space Systems Co., Adv. Technology Center, Palo Alto, CA 94304USA
A. Rondinone
Affiliation:
Center for Nanophase Materials Sciences, ORNL, Oak Ridge, TN 37831-6493USA
P. Bedworth
Affiliation:
Lockheed Martin Space Systems Co., Adv. Technology Center, Palo Alto, CA 94304USA
S. Heise
Affiliation:
Lockheed Martin Space Systems Co., Adv. Technology Center, Palo Alto, CA 94304USA
S. Sinton
Affiliation:
Lockheed Martin Space Systems Co., Adv. Technology Center, Palo Alto, CA 94304USA

Abstract

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Type
Abstract
Copyright
Copyright © Microscopy Society of America 2015 

References

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[6] Research supported by Independent Research & Development funding at Lockheed Martin and through a user project supported by ORNL's Center for Nanophase Materials Sciences (CNMS), which is a Dept. of Energy, Office of Science User Facility.Google Scholar