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New Approach to Obtain Elemental Maps by Using Energy-Filterd Images

Published online by Cambridge University Press:  01 August 2002

Y. Taniguchi ,
K. Kaji ,
Y. Ueki  and
S. Isakozawa
Y. Taniguchi
Affiliation:
Design & Manufacturing Group, Hitachi High-Technologies, Hitachinaka, Ibaraki 312-8504, Japan
K. Kaji
Affiliation:
Hitachi Research Laboratory, Hitachi Ltd., Hitachi, Ibaraki 319-1292, Japan
Y. Ueki
Affiliation:
Hitachi Science Systems, Ltd., Hitachi, Ibaraki 312-8504, Japan
S. Isakozawa
Affiliation:
Design & Manufacturing Group, Hitachi High-Technologies, Hitachinaka, Ibaraki 312-8504, Japan

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 590 - 591
Copyright
Copyright © Microscopy Society of America 2002