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Novel Rapid Nondestructive Technique for Locating Tiny Voids in Metallization Line

Published online by Cambridge University Press:  01 August 2002

Zheng Hao Gan  and
Cher Ming Tan
Zheng Hao Gan
Affiliation:
Division of Microelectronics, School of Electrical & Electronic Engineering, Nanyang Technological University, Singapore 639798
Cher Ming Tan
Affiliation:
Division of Microelectronics, School of Electrical & Electronic Engineering, Nanyang Technological University, Singapore 639798

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 788 - 789
Copyright
Copyright © Microscopy Society of America 2002