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Novel Scanning Ion Microscope with H3+ Gas Field Ionization Source

Published online by Cambridge University Press:  25 July 2016

Shinichi Matsubara ,
Hiroyasu Shichi ,
Yoshimi Kawanami  and
Tomihiro Hashizume
Shinichi Matsubara
Affiliation:
Research & Development Group, Hitachi, Ltd., 1-280 Higashi-Koigakubo, Kokubunji, Tokyo, Japan
Hiroyasu Shichi
Affiliation:
Research & Development Group, Hitachi, Ltd., 1-280 Higashi-Koigakubo, Kokubunji, Tokyo, Japan
Yoshimi Kawanami
Affiliation:
Hitachi High-Tech Science Corporation, 36-1, Takenoshita, Oyama, Shizuoka, Japan
Tomihiro Hashizume
Affiliation:
Research & Development Group, Hitachi, Ltd., 1-280 Higashi-Koigakubo, Kokubunji, Tokyo, Japan

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 614 - 615
Copyright
© Microscopy Society of America 2016 

References

References:

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