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Quantitative Nano-Analysis of Superconducting Materials via SEM-FIB 3D-EDS Tomography

Published online by Cambridge University Press:  23 September 2015

Giuseppe Pavia ,
Martin Kienle ,
Ingo Schulmeyer ,
Frank Bauer ,
Marco Cantoni  and
Ken Lagarec
Giuseppe Pavia
Affiliation:
Carl Zeiss Microscopy GmbH, Product Management Materials, Oberkochen, Germany
Martin Kienle
Affiliation:
Carl Zeiss Microscopy GmbH, Product Management Materials, Oberkochen, Germany
Ingo Schulmeyer
Affiliation:
Carl Zeiss Microscopy GmbH, Product Management Materials, Oberkochen, Germany
Frank Bauer
Affiliation:
Oxford Instruments GmbH, Wiesbaden, Germany
Marco Cantoni
Affiliation:
EPFL, CIME, Lausanne, Switzerland
Ken Lagarec
Affiliation:
FIBICS Incorporated, Ottawa, Canada

Abstract

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Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1341 - 1342
Copyright
Copyright © Microscopy Society of America 2015