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Review of Atom Probe Tomography Applications for Semiconductor materials

Published online by Cambridge University Press:  26 July 2009

L Renaud ,
I Martin ,
B Salle ,
R Benbalagh ,
A Davis  and
M Schuhmacher
L Renaud
Affiliation:
Cameca,Inc ,France
I Martin
Affiliation:
Cameca,Inc ,France
B Salle
Affiliation:
Cameca,Inc ,France
R Benbalagh
Affiliation:
Cameca,Inc ,France
A Davis
Affiliation:
Cameca,Inc ,France
M Schuhmacher
Affiliation:
Cameca,Inc ,France

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 262 - 263
Copyright
Copyright © Microscopy Society of America 2009