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SEM-EDS coating thickness assessment: an insight into the accuracy of Monte Carlo simulations carried out for TiN coatings using three different freeware graphical user interface

Published online by Cambridge University Press:  30 July 2021

Juan P.N. Cruz ,
Carlos M. Garzon  and
Abel. A.C. Recco
Juan P.N. Cruz
Affiliation:
Departamento de Física, Universidad Nacional de Colombia, Bogotá, Distrito Capital de Bogota, Colombia
Carlos M. Garzon
Affiliation:
Departamento de Física, Universidad Nacional de Colombia, Bogotá, Distrito Capital de Bogota, Colombia
Abel. A.C. Recco
Affiliation:
Departamento de Física, Universidade do Estado de Santa Catarina, Santa Catarina, Brazil

Abstract

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Type
Microscopy and Microanalysis for Real World Problem Solving
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 2510 - 2512
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Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

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Matthews, M.B., Kearns, S.L. & Buse, B. (2018), The accuracy of Al and Cu film thickness determinations and the implications for electron probe microanalysis. Microsc Microanal. 24(2), 83-92, https://doi.org/10.1017/S1431927618000193.Google Scholar