Hostname: page-component-76fb5796d-2lccl Total loading time: 0 Render date: 2024-04-26T03:33:36.828Z Has data issue: false hasContentIssue false
  • English
  • Français

The Simulation of Energy Distribution of Electrons Detected by Segmental Ionization Detector in High Pressure Conditions of ESEM

Published online by Cambridge University Press:  28 September 2015

V. Neděla ,
I. Konvalina ,
M. Oral  and
J. Hudec
V. Neděla
Affiliation:
Institute of Scientific Instruments ASCR, v.v.i, Brno, Czech Republic
I. Konvalina
Affiliation:
Institute of Scientific Instruments ASCR, v.v.i, Brno, Czech Republic
M. Oral
Affiliation:
Institute of Scientific Instruments ASCR, v.v.i, Brno, Czech Republic
J. Hudec
Affiliation:
Institute of Scientific Instruments ASCR, v.v.i, Brno, Czech Republic

Abstract

Core share and HTML view are not available for this content. However, as you have access to this content, a full PDF is available via the ‘Save PDF’ action button.

This paper presents computed dependencies of the detected electron energy distribution on the water vapour pressure in an environmental scanning electron microscope obtained using the EOD software with a Monte Carlo plug-in for the electron-gas interactions. The software GEANT was used for the Monte Carlo simulations of the beam-sample interactions and the signal electron emission from the sample into the gaseous environment. The simulations were carried out for selected energies of the signal electrons collected by two electrodes with two different diameters with the voltages of +350 V and 0, respectively, and then 0 and +350 V, respectively, and for the distance of 2 mm between the sample and the detection electrodes of the ionization detector. The simulated results are verified by experimental measurements. Consequences of the simulated and experimental dependencies on the acquisition of the topographical or material contrasts using our ionization detector equipped with segmented detection electrode are described and discussed.

Type
Numerical Methods
Information
Microscopy and Microanalysis , Volume 21 , Supplement S4: Proceedings Ninth International Conference on Charged Particle Optics , June 2015 , pp. 264 - 269
Copyright
Copyright © Microscopy Society of America 2015 

References

[1]Neděla, V, Microscopy Research Technique 70 (2007). p. 95.CrossRefGoogle Scholar
[2]Donald, AM, Nat. Mater. 2 (2003). p. 511.CrossRefGoogle Scholar
[3]Danilatos, GD, J. Microsc. 160 (1990). p. 9.CrossRefGoogle Scholar
[4]Neděla, V, et al, Nucl. Instrum. Meth. A 645 (2011). p. 79.CrossRefGoogle Scholar
[5]Danilatos, GD, Microsc. Microanal. 6 (2000). p. 12.CrossRefGoogle Scholar
[6]Toth, M, et al, Ultramicroscopy 94 (2003). p. 71.CrossRefGoogle Scholar
[7]Jirák, J, et al, J. Microsc. 239 (2010). p. 233.CrossRefGoogle Scholar
[8]Fletcher, AL, et al, J.Phys. D: Appl.Phys 30 (1997). p. 2249.CrossRefGoogle Scholar
[9] US Patent No. 4,897,545.Google Scholar
[10]Fletcher, AL, et al, J. Microsc. 196 (1999). p. 26.CrossRefGoogle Scholar
[11]Meredith, P, et al, Scanning 18 (1996). p. 467.CrossRefGoogle Scholar
[12]Thiel, BL, et al, J. Microsc. 187 (1997). p. 143.CrossRefGoogle Scholar
[13]Autrata, R, et al, Scanning 14 (1992). p. 127.CrossRefGoogle Scholar
[14]Romanovský, V, et al, European Microscopy and Analysis 59 (1999). p. 19.Google Scholar
[15]Neděla, V, et al, Microsc. Microanal. 17(S2 (2011). p. 920.CrossRefGoogle Scholar
[16]Agostinelli, S, et al, Nucl. Instr. Meth. A 506 (2003). p. 250.CrossRefGoogle Scholar
[17]Lencovâ, B, et al, Phys. Procedia 1 (2008). p. 315.CrossRefGoogle Scholar
[18]Neděla, V, J. Microsc. 237 (2010). p. 7.CrossRefGoogle Scholar
[19] This work was supported by the Grant Agency of the Czech Republic, grant No. GA14-22777S.Google Scholar