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A Standards-based Approach to Dopant Quantification Using Atom Probe Tomography

Published online by Cambridge University Press:  22 July 2022

Karen DeRocher ,
Mark McLean  and
Fred Meisenkothen
Karen DeRocher*
Affiliation:
National Institute of Standards and Technology, Gaithersburg, Maryland, United States
Mark McLean
Affiliation:
National Institute of Standards and Technology, Gaithersburg, Maryland, United States
Fred Meisenkothen
Affiliation:
National Institute of Standards and Technology, Gaithersburg, Maryland, United States
*
*Corresponding author: karen.derocher@nist.gov

Abstract

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Type
Expanding the Limits of Atom Probe Tomography
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 728 - 729
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Copyright
Copyright © Microscopy Society of America 2022

References

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Certain commercial equipment, instruments, or materials are identified in this paper in order to specify the experimental procedure adequately. Such identification is not intended to imply recommendation or endorsement by the National Institute of Standards and Technology, nor is it intended to imply that the materials or equipment identified are necessarily the best available for the purpose.Google Scholar