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Structural defects in ZnO thin films grown by atomic layer deposition at low temperatures

Published online by Cambridge University Press:  30 July 2021

David Elam ,
Eduardo Ortega ,
Andrey Chabanov  and
Arturo Ponce
David Elam
Affiliation:
Department of Physics and Astronomy. The University of Texas at San Antonio, San Antonio, Texas, United States
Eduardo Ortega
Affiliation:
INM - Leibniz Institute for New Materials, Saarbrücken, Texas, Germany
Andrey Chabanov
Affiliation:
Department of Physics and Astronomy. The University of Texas at San Antonio, San Antonio, Texas, United States
Arturo Ponce
Affiliation:
Department of Physics and Astronomy. The University of Texas at San Antonio, United States

Abstract

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Type
Defects in Materials: How We See and Understand Them
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 2660 - 2662
Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

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