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The Study of “Window-less” EDS Detector With Low Voltage FE-SEM

Published online by Cambridge University Press:  25 July 2016

Yasuaki Yamamoto ,
Hirobumi Morita ,
Hirohisa Yamada ,
Hideyuki Takahashi ,
Masaru Takakura ,
Naoki Kikuchi ,
Takeshi Nokuo  and
Natasha Erdman
Yasuaki Yamamoto
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, Japan
Hirobumi Morita
Affiliation:
Oxford Instruments KK, IS Building, 3-32-42, Higashi-Shinagawa, Shinagawa-ku, Tokyo, Japan
Hirohisa Yamada
Affiliation:
National Institute of Technology, Nara College, Yamatokoriyama, Nara, Japan
Hideyuki Takahashi
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, Japan
Masaru Takakura
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, Japan
Naoki Kikuchi
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, Japan
Takeshi Nokuo
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, Japan
Natasha Erdman
Affiliation:
JEOL USA Inc., Peabody, MA U.S.A.

Abstract

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Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 640 - 641
Copyright
© Microscopy Society of America 2016