Hostname: page-component-76fb5796d-r6qrq Total loading time: 0 Render date: 2024-04-29T05:51:14.367Z Has data issue: false hasContentIssue false
  • English
  • Français

Towards a High-Brightness Electron Impact Ion Source for Nano-Applications

Published online by Cambridge University Press:  28 September 2015

Olivier De Castro ,
David Dowsett ,
Tom Wirtz  and
Serge Della Negra
Olivier De Castro
Affiliation:
Department “Science and Analysis of Materials“ (SAM), Centre de Recherche Public - Gabriel Lippmann, Belvaux, Luxembourg.
David Dowsett
Affiliation:
Department “Science and Analysis of Materials“ (SAM), Centre de Recherche Public - Gabriel Lippmann, Belvaux, Luxembourg.
Tom Wirtz
Affiliation:
Department “Science and Analysis of Materials“ (SAM), Centre de Recherche Public - Gabriel Lippmann, Belvaux, Luxembourg.
Serge Della Negra
Affiliation:
Institut de Physique Nucléaire Orsay (IPNO), Université Paris Sud, Orsay, France.

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Ion Optics
Information
Microscopy and Microanalysis , Volume 21 , Supplement S4: Proceedings Ninth International Conference on Charged Particle Optics , June 2015 , pp. 94 - 99
Copyright
Copyright © Microscopy Society of America 2015 

References

References:

[1]Introduction to Focused Ion Beams", ed. Giannuzzi, LA & Stevie, FA, (Springer, New York.Google Scholar
[2]Tseng, AA, Small 1 (2005). p 924.Google Scholar
[3]Giannuzzi, LA & Stevie, FA, Micron 30 (1999). p. 197.CrossRefGoogle Scholar
[4]Economou, NP, et al, Scanning 34 (2012). p. 83.CrossRefGoogle Scholar
[5]Migeon, HN, et al, Int. J. Mass Spectrom. Ion Processes 143 (1995). p., 51.CrossRefGoogle Scholar
[6]Tondare, VN, J. Vac. Sci. Technol. A 23 (2005). p. 1498.CrossRefGoogle Scholar
[7]Nier, AO, Rev. Sci. Instrum. 18 (1947). p. 398.CrossRefGoogle Scholar
[8]Barth, JE, et al, Microelectronic Eng 3 (1985). p. 147.CrossRefGoogle Scholar
[9] SIMION 3D version 8.1; Scientific Instrument. Services, Inc.Google Scholar
[10]Dowsett, D this proceedings.Google Scholar
[11]Yamamoto, S, Rep. Prog. Phys 69 (2006). p. 181.CrossRefGoogle Scholar
[12]Rejoub, R, et al, Phys. Rev. A 65 (2002), 042713.CrossRefGoogle Scholar
[13]Mark, TD in Electron Ionization (ed. TD Mark & GH Mark, (Innsbruck Uni. Press. p. 137.Google Scholar
[14]Smith, NS, et al, Appl. Surf. Sci 255 (2008). p. 1606.CrossRefGoogle Scholar
[15] This work is supported by the Fonds National de la Recherche, Luxembourg (AFR-Grant 5944057).Google Scholar