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Traceable Measurements using a Metrology Scanning Electron Microscope

Published online by Cambridge University Press:  22 July 2022

Bradley Damazo ,
András E. Vladár ,
Olivier Marie-Rose  and
John Kramar
Bradley Damazo*
Affiliation:
National Institute of Standards and Technology, Microsystems & Nanotechnology Division, Gaithersburg, MD, USA
András E. Vladár
Affiliation:
National Institute of Standards and Technology, Microsystems & Nanotechnology Division, Gaithersburg, MD, USA
Olivier Marie-Rose
Affiliation:
National Institute of Standards and Technology, Microsystems & Nanotechnology Division, Gaithersburg, MD, USA Prometheus Computing, LLC, Cullowhee, NC, USA
John Kramar
Affiliation:
National Institute of Standards and Technology, Microsystems & Nanotechnology Division, Gaithersburg, MD, USA
*
*Corresponding author: bradley.damazo@nist.gov

Abstract

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Type
Artificial Intelligence, Instrument Automation, And High-dimensional Data Analytics for Microscopy and Microanalysis
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 3088 - 3090
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Copyright
Copyright © Microscopy Society of America 2022

References

Vladár, AE et al., SPIE Proc. Advance Lithography (2004).Google Scholar
[2] Vladár, AE et al. Microscopy Today (2009).Google Scholar