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Use of Electron Diffraction for Determining the Orientation of Rapid Thermally Annealed Lead Zirconate Titanate Thin Film On (111) Pt Coated Si Substrate

Published online by Cambridge University Press:  02 July 2020

S.C. Cheng ,
T. Su  and
S. Trolier-McKinstry
S.C. Cheng
Affiliation:
Materials Characterization Laboratory, Pennsylvania State University
T. Su
Affiliation:
Materials Research Laboratory, Pennsylvania State University, University Park, PA16802
S. Trolier-McKinstry
Affiliation:
Materials Research Laboratory, Pennsylvania State University, University Park, PA16802
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Extract

Lead zirconate titanate (PZT) is a perovskite-staictured material which is ferroelectric over most of the solid solution and which exhibits a range of electrical and electromechanical properties depending on the Zr/Ti ratio. Thin film PZT is currently being developed for piezoelectric actuators, ferroelectric memory devices and pyroelectric detectors. The ferroelectric properties and microstructures of the PZT films depend upon numerous processing parameters.In this research, sol-gel PZT films crystallized by rapid thermal annealing at 700°C for 30 seconds were investigated. A modification of the procedure described by Budd, Dey and Payne was utilized for the solution preparation. The electrodes/substrates which have been used for the deposition of PZT are Pt/Ti/SiO,/Si. The approximate thicknesses of Pt, Ti and SiO2 layers are 150 nm, 20 nm and 1000 nm, respectively. Transmission electron microscopy (TEM) was used to reveal the microstructure of the films, including the interfacial characteristics, grain sizes and domain structures. Cross sectional specimens were prepared by the following procedures.

Type
Thin Films/Coatings
Information
Microscopy and Microanalysis , Volume 5 , Issue S2: Proceedings: Microscopy & Microanalysis '99, Microscopy Society of America 57th Annual Meeting, Microbeam Analysis Society 33rd Annual Meeting, Portland, Oregon August 1-5, 1999 , August 1999 , pp. 828 - 829
Copyright
Copyright © Microscopy Society of America

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References

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