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X-Ray Microanalysis in the Environmental SEM Using Mapping and Fourier Deconvolution Techniques

Published online by Cambridge University Press:  02 July 2020

Matthew R. Phillips ,
Brendan Griffin ,
Dominque Drouin ,
Clive Nockolds  and
Guy Remond
Matthew R. Phillips
Affiliation:
Microstructural Analysis Unit, University of Technology, Sydney, PO Box 123 Broadway, New South Wales, Australia2007
Brendan Griffin
Affiliation:
Centre of Microscopy and Microanalysis, The University of Western Australia, 35 Stirling Highway, Crawley, WA, 6009
Dominque Drouin
Affiliation:
Départment de génie électronique et génie information, Univérsite de Sherbrooke, Sherbrooke, Québec, J1K 2R1, Canada
Clive Nockolds
Affiliation:
Microstructural Analysis Unit, University of Technology, Sydney, PO Box 123 Broadway, New South Wales, Australia2007
Guy Remond
Affiliation:
Microstructural Analysis Unit, University of Technology, Sydney, PO Box 123 Broadway, New South Wales, Australia2007
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Abstract

X-ray microanalysis of any type of specimen in its natural state without the use of conventional SEM specimen preparation techniques has immense potential in a wide range of scientific and industrial applications. This capability would be particularly useful in microanalysis applications where it is highly desirable to preserve the integrity of the specimen, for example in semiconductor failure analysis and forensic investigations. in principle, this X-ray microanalysis goal can be achieved in an environmental or variable pressure scanning electron microscope (VPSEM) because specimen charging and vacuum stability problems are negated by the presence of a gas in the specimen chamber. However, the accuracy and spatial resolution of X-ray microanalysis in the VPSEM is significantly degraded by the chamber gas as it scatters primary beam electrons, generating spurious X-rays far from the analysis point. to date, two different X-ray measurement strategies have been developed to facilitate X-ray microanalysis at high chamber pressure in the VPSEM.

Type
Quantitative X-Ray Microanalysis in the Microprobe, in the SEM and in The ESEM:Theory and Practice (Organized by R. Gauvin and E. Lifshin)
Information
Microscopy and Microanalysis , Volume 7 , Issue S2: Proceedings: Microscopy & Microanalysis 2001, Microscopy Society of America 59th Annual Meeting, Microbeam Analysis Society 35th Annual Meeting, Long Beach, California August 5-9, 2001 , August 2001 , pp. 708 - 709
Copyright
Copyright © Microscopy Society of America 2001

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References

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