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Low Voltage Scanning Electron Microscopy

Published online by Cambridge University Press:  14 March 2018

David C Joy  and
Dale E Newbury
David C Joy
Affiliation:
University of Tennessee, Knoxville, TN
Dale E Newbury
Affiliation:
NIST, Gaithersburg, MD

Extract

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Low Voltage Scanning Electron Microscopy (LVSEM), defined as operation in the energy range below 5 keV, has become perhaps the most important single operational mode of the SEM. This is because the LVSEM offers advantages in the imaging of surfaces, in the observation of poorly conducting and insulating materials, and for high spatial resolution X-ray microanalysis. These benefits all occur because a reduction in the energy Eo of the incident beam leads to a rapid fall in the range R of the electrons since R ∼k.E01.66. The reduction in the penetration of the beam has important consequences.

Type
Research Article
Information
Microscopy Today , Volume 10 , Issue 2 , March 2002 , pp. 22 - 23
Copyright
Copyright © Microscopy Society of America 2002

References

1. Joy, D.C., Joy, C.S., (1996), ‘Low Voltage Scanning Electron Microscopy’, Micron 27. 247–263 CrossRefGoogle Scholar
2. Newbury, D.E. “Measures for Spectral Quality in Low-Voltage X-ray Microanalysis,” SCANNING, 22 (2000) 345–351.CrossRefGoogle ScholarPubMed