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Precision and Detection Limits for EDS Analysis in the SEM

Published online by Cambridge University Press:  14 March 2018

Eric Lifshin  and
Raynald Gauvin
Eric Lifshin*
Affiliation:
University at Albany, Albany, NY
Raynald Gauvin*
Affiliation:
McGill University, Montreal, Quebec
*
elifshin@uamail.albany.edu
raynald.gauvin@McGil.ca

Extract

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Microanalysis using an EDS on an SEM are sometimes asked whether two samples are of different composition, or if different regions in the same sample vary in composition, A best educated guess may be that differences of a few percent can be distinguished under optimized conditions that include favorable data collection times and count rates, stable instrument operation, and well prepared samples and standards that remain free of contamination. Another frequently asked question is whether it is possible to detect a given amount of a particular element in a sample.

Type
Research Article
Information
Microscopy Today , Volume 11 , Issue 5 , August 2003 , pp. 46 - 49
Copyright
Copyright © Microscopy Society of America 2003

References

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5. Gauvin, R. and Lifshin, E., submitted to Microsc. Microanl.Google Scholar