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Effect of rapid thermal treatments on the physical properties of Cobalt Doped ZnO Films

Published online by Cambridge University Press:  01 February 2016

C. Davesnne ,
C. Frilay ,
P. Marie ,
C. Labbé ,
F. Ehre ,
N. Chery  and
X. Portier
C. Davesnne
Affiliation:
CIMAP, CEA, UMR CNRS 6252, ENSICAEN, UNICAEN 6 Boulevard du Maréchal Juin, 14050 CAEN Cedex, France
C. Frilay
Affiliation:
CIMAP, CEA, UMR CNRS 6252, ENSICAEN, UNICAEN 6 Boulevard du Maréchal Juin, 14050 CAEN Cedex, France
P. Marie
Affiliation:
CIMAP, CEA, UMR CNRS 6252, ENSICAEN, UNICAEN 6 Boulevard du Maréchal Juin, 14050 CAEN Cedex, France
C. Labbé
Affiliation:
CIMAP, CEA, UMR CNRS 6252, ENSICAEN, UNICAEN 6 Boulevard du Maréchal Juin, 14050 CAEN Cedex, France
F. Ehre
Affiliation:
CIMAP, CEA, UMR CNRS 6252, ENSICAEN, UNICAEN 6 Boulevard du Maréchal Juin, 14050 CAEN Cedex, France
N. Chery
Affiliation:
CIMAP, CEA, UMR CNRS 6252, ENSICAEN, UNICAEN 6 Boulevard du Maréchal Juin, 14050 CAEN Cedex, France
X. Portier*
Affiliation:
CIMAP, CEA, UMR CNRS 6252, ENSICAEN, UNICAEN 6 Boulevard du Maréchal Juin, 14050 CAEN Cedex, France
*
*(Email: xavier.portier@ensicaen.fr)
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Abstract

Cobalt doped ZnO (ZnO:Co) films with a 1 at% doping rate have been successfully grown on (100) oriented p type Si substrates by radiofrequency magnetron sputtering. Post annealing treatments at 973 K for various short periods have been carried out and structural, optical and electrical properties of the films have been investigated. Upon rapid annealing, the dopant distribution in the film has been found homogeneous. The annealing improves the (002) texture of the film and the mean column width increases with the annealing duration from 60 nm up to 95 nm. The lattice parameter of the ZnO:Co films decreases upon annealing and approaches that of bulk ZnO. The photoluminescence (PL) study reveals that the Co2+ ions can be excited directly or through a transfer mechanism from the matrix. The PL intensity decreases with the annealing time suggesting a diffusion process of the dopant impeding the Co2+ emission. At last, the electrical conductivity reaches values compatible with potential electroluminescent applications of the ZnO:Co films.

Keywords

thin filmoptical propertieselectrical properties
Type
Articles
Information
MRS Advances , Volume 1 , Issue 2: Energy and Sustainability , 2016 , pp. 163 - 168
Copyright
Copyright © Materials Research Society 2016 

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References

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