Hostname: page-component-848d4c4894-p2v8j Total loading time: 0.001 Render date: 2024-05-15T10:15:17.827Z Has data issue: false hasContentIssue false
  • English
  • Français

Scanning transmission electron microscopy: Seeing the atoms more clearly

Published online by Cambridge University Press:  09 October 2012

Stephen J. Pennycook
Stephen J. Pennycook*
Affiliation:
Materials Science and Technology Division at Oak Ridge National Laboratory; pennycooksj@ornl.gov
Get access

Abstract

This article shows how the scanning transmission electron microscope provides a Z-contrast image (where Z is atomic number) that is often directly interpretable and can show higher resolution than a phase-contrast image. It represents an incoherent mode of imaging, similar to that described by Lord Rayleigh for the optical microscope over a century ago. Today, resolution has reached a half Ångstrom, and spectroscopic analysis of individual atomic columns, even of individual atoms in two-dimensional materials, has become possible.

Keywords

Scanning transmission electron microscopy (STEM)electron energy loss spectroscopy (EELS)atomic arrangementschemical compositiondefects
Type
Research Article
Information
MRS Bulletin , Volume 37 , Issue 10: Thermal-barrier coatings for more efficient gas-turbine engines , October 2012 , pp. 943 - 951
Copyright
Copyright © Materials Research Society 2012

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Abbe, E., Archiv. f. Mik. Anat. 9, 413 (1873).CrossRefGoogle Scholar
Rayleigh, Lord, Philos. Mag. 42, 167 (1896).CrossRefGoogle Scholar
Knoll, M., Ruska, E., Z. Phys. 78, 318 (1932).CrossRefGoogle Scholar
von Ardenne, M., Z. Phys. A: Hadrons Nucl. 112, 744 (1939).CrossRefGoogle Scholar
Smith, D.J., Rep. Prog. Phys. 60, 1513 (1997).CrossRefGoogle Scholar
Crewe, A.V., Science 154, 729 (1966).CrossRefGoogle Scholar
Müller, H., Uhlemann, S., Hartel, P., Haider, M., Microsc. Microanal. 12, 442 (2006).CrossRefGoogle Scholar
Wall, J., Langmore, J., Isaacson, M., Crewe, A., Proc. Natl. Acad. Sci. U.S.A. 71, 1 (1974).CrossRefGoogle Scholar
Müller, E.W., J. Appl. Phys. 27, 474 (1956).CrossRefGoogle Scholar
Isaacson, M., Kopf, D., Ohtsuki, M., Utlaut, M., Ultramicroscopy 4, 101 (1979).CrossRefGoogle Scholar
Isaacson, M., Kopf, D., Utlaut, M., Parker, N.W., Crewe, A., Proc. Natl. Acad. Sci. U.S.A. 74, 1802 (1977).CrossRefGoogle Scholar
Crewe, A., Isaacson, M., Johnson, D., Nature 231, 262 (1971).CrossRefGoogle Scholar
Crewe, A.V., Adv. Imaging Electron Phys. 159, 1 (2009).CrossRefGoogle Scholar
Engel, A., Wiggins, J.W., Woodruff, D.C., J. Appl. Phys. 45, 2739 (1974).CrossRefGoogle Scholar
Donald, A.M., Craven, A.J., Philos. Mag. A 39, 1 (1979).CrossRefGoogle Scholar
Treacy, M.M.J., Howie, A., Wilson, C.J., Philos. Mag. A 38, 569 (1978).CrossRefGoogle Scholar
Treacy, M.M.J., Howie, A., Pennycook, S.J., in Electron Microscopy and Analysis, Mulvey, T., Ed. Inst. Phys. Conf. Ser. No. 52 (1980), pp. 261–266.Google Scholar
Pennycook, S.J., Howie, A., Philos. Mag. A 41, 809 (1980).CrossRefGoogle Scholar
Pennycook, S.J., Narayan, J., Appl. Phys. Lett. 45, 385 (1984).CrossRefGoogle Scholar
Pennycook, S.J., Boatner, L.A., Nature 336, 565 (1988).CrossRefGoogle Scholar
Pennycook, S.J., Jesson, D.E., Phys. Rev. Lett. 64, 938 (1990).CrossRefGoogle Scholar
Pennycook, S.J., Jesson, D.E., Ultramicroscopy 37, 14 (1991).CrossRefGoogle Scholar
Jesson, D.E., Pennycook, S.J., Proc. R. Soc. London, Ser. A 441, 261 (1993).Google Scholar
Jesson, D., Pennycook, S., Proc. Math. Phys. Sci. 449, 273 (1995).Google Scholar
Pennycook, S.J., Nellist, P.D., in Impact of Electron and Scanning Probe Microscopy on Materials Research, Rickerby, D.G., Valdrè, U., Valdrè, G., Eds. (Kluwer, Dordrecht, the Netherlands, 1999) pp. 161–207.CrossRefGoogle Scholar
Pennycook, S.J., Browning, N.D., McGibbon, M.M., McGibbon, A.J., Jesson, D.E., Chisholm, M.F., Philos. Trans. R. Soc. London, Ser. A 354, 2619 (1996).Google Scholar
McGibbon, A.J., Pennycook, S.J., Angelo, J., Science 269, 519 (1995).CrossRefGoogle Scholar
Chisholm, M.F., Browning, N.D., Pennycook, S.J., Jebasinski, R., Mantl, S., Appl. Phys. Lett. 64, 3608 (1994).CrossRefGoogle Scholar
Jesson, D.E., Pennycook, S.J., Baribeau, J., Phys. Rev. Lett. 66, 750 (1991).CrossRefGoogle Scholar
Steinhardt, P.J., Jeong, H.C., Saitoh, K., Tanaka, M., Abe, E., Tsai, A.P., Nature 396, 55 (1998).CrossRefGoogle Scholar
Yan, Y., Pennycook, S.J., Nature 403, 266 (2000).CrossRefGoogle Scholar
Abe, E., Saitoh, K., Takakura, H., Tsai, A., Steinhardt, P., Jeong, H.C., Phys. Rev. Lett. 84, 4609 (2000).CrossRefGoogle Scholar
Yan, Y., Pennycook, S.J., Phys. Rev. Lett. 86, 1542 (2001).CrossRefGoogle Scholar
Abe, E., Yan, Y., Pennycook, S.J., Nat. Mater. 3, 759 (2004).CrossRefGoogle Scholar
Bak, P., Phys. Rev. Lett. 56, 861 (1986).CrossRefGoogle Scholar
Penrose, R., Bull. Inst. Math. Appl. 10, 266.Google Scholar
Browning, N.D., Chisholm, M.F., Pennycook, S.J., Nature 366, 143 (1993).CrossRefGoogle Scholar
Pennycook, S.J., Varela, M., Lupini, A.R., Oxley, M.P., Chisholm, M.F., J. Electron Microsc. 58, 87 (2009).CrossRefGoogle Scholar
Batson, P.E., Nature 366, 727 (1993).CrossRefGoogle Scholar
Muller, D.A., Tzou, Y., Raj, R., Silcox, J., Nature 366, 725 (1993).CrossRefGoogle Scholar
James, E.M., Browning, N.D., Ultramicroscopy 78, 125 (1999).CrossRefGoogle Scholar
James, E.M., Browning, N.D., Nicholls, A.W., Kawasaki, M., Stemmer, S., J. Electron Microsc. 47, 561 (1998).CrossRefGoogle Scholar
Feynman, R.P., J. Microelectromech. Syst. 1, 60 (1992).CrossRefGoogle Scholar
Scherzer, O., Optik 2, 114 (1947).Google Scholar
Ronchi, V., Appl. Opt. 3, 437 (1964).CrossRefGoogle Scholar
Cowley, J., Ultramicroscopy 4, 413 (1979).CrossRefGoogle Scholar
Lupini, A.R., Wang, P., Nellist, P.D., Kirkland, A.I., Pennycook, S.J., Ultramicroscopy 110, 891 (2010).CrossRefGoogle Scholar
Sawada, H., Sannomiya, T., Hosokawa, F., Nakamichi, T., Kaneyama, T., Tomita, T., Kondo, Y., Tanaka, T., Oshima, Y., Tanishiro, Y., Takayanagi, K., in EMC 2008, Richter, S., Schwedt, A., Eds. (Springer-Verlag, Berlin, 2008), vol. 1, p. 1467.Google Scholar
Haider, M., Uhlemann, S., Rose, H., Urban, K., Nature 392, 768 (1998).CrossRefGoogle Scholar
Batson, P.E., Dellby, N., Krivanek, O.L., Nature 418, 617 (2002).CrossRefGoogle Scholar
Lupini, A.R., Pennycook, S.J., Ultramicroscopy 96, 313 (2003).CrossRefGoogle Scholar
Pennycook, S.J., Lupini, A.R., McBride, J.R., Rosenthal, S.J., Krivanek, O.L., Wang, L., Nellist, P.D., Pantelides, S.T., Yahil, A., Dellby, N., Z. Metallkd. 94, 350 (2003).CrossRefGoogle Scholar
Voyles, P., Grazul, J., Muller, D., Ultramicroscopy 96, 251 (2003).CrossRefGoogle Scholar
Voyles, P., Muller, D., Grazul, J., Citrin, P., Gossmann, H., Nature 416, 826 (2002).CrossRefGoogle Scholar
Varela, M., Findlay, S.D., Lupini, A.R., Christen, H.M., Borisevich, A.Y., Dellby, N., Krivanek, O.L., Nellist, P.D., Oxley, M.P., Allen, L.J., Pennycook, S.J., Phys. Rev. Lett. 92, 95502 (2004).CrossRefGoogle Scholar
Nellist, P.D., Chisholm, M.F., Dellby, N., Krivanek, O.L., Murfitt, M.F., Szilagyi, Z.S., Lupini, A.R., Borisevich, A., Sides, W.H., Pennycook, S.J., Science, 305 1741 (2004).CrossRefGoogle Scholar
Shibata, N., Painter, G.S., Becher, P.F., Pennycook, S.J., Appl. Phys. Lett. 89, 051908 (2006).CrossRefGoogle Scholar
Shibata, N., Pennycook, S.J., Gosnell, T.R., Painter, G.S., Shelton, W.A., Becher, P.F., Nature 428, 730 (2004).CrossRefGoogle Scholar
Idrobo, J.C., Oxley, M.P., Walkosz, W., Klie, R.F., Ogut, S., Mikijelj, B., Pennycook, S.J., Pantelides, S.T., Appl. Phys. Lett. 95, 164101 (2009).CrossRefGoogle Scholar
Borisevich, A.Y., Lupini, A.R., Pennycook, S.J., Proc. Natl. Acad. Sci. U.S.A. 103, 3044 (2006).CrossRefGoogle Scholar
van Benthem, K., Lupini, A.R., Kim, M., Baik, H.S., Doh, S., Lee, J.-H., Oxley, M.P., Findlay, S.D., Allen, L.J., Luck, J.T., Pennycook, S.J., Appl. Phys. Lett. 87, 034104 (2005).CrossRefGoogle Scholar
Yurdakul, H., Idrobo, J.C., Pennycook, S.J., Turan, S., Scripta Mater. 65, 656 (2011).CrossRefGoogle Scholar
Oh, S.H., van Benthem, K., Molina, S.I., Borisevich, A.Y., Luo, W., Werner, P., Zakharov, N.D., Kumar, D., Pantelides, S.T., Pennycook, S.J., Nano Lett. 8, 1016 (2008).CrossRefGoogle Scholar
Pennycook, S.J., Chisholm, M.F., Lupini, A.R., Varela, M., Borisevich, A.Y., Oxley, M.P., Luo, W.D., van Benthem, K., Oh, S.H., Sales, D.L., Molina, S.I., Garcia-Barriocanal, J., Leon, C., Santamaria, J., Rashkeev, S.N., Pantelides, S.T., Philos. Trans. R. Soc. London, Ser. A 367, 3709 (2009).Google Scholar
Jia, C., Lentzen, M., Urban, K., Science 299, 870 (2003).CrossRefGoogle Scholar
Shibata, N., Chisholm, M.F., Nakamura, A., Pennycook, S.J., Yamamoto, T., Ikuhara, Y., Science 316, 82 (2007).CrossRefGoogle Scholar
Borisevich, A.Y., Chang, H.J., Huijben, M., Oxley, M.P., Okamoto, S., Niranjan, M.K., Burton, J.D., Tsymbal, E.Y., Chu, Y.H., Yu, P., Ramesh, R., Kalinin, S.V., Pennycook, S.J., Phys. Rev. Lett. 105, 087204 (2010).CrossRefGoogle Scholar
Scherzer, O., J. Appl. Phys. 20, 20 (1949).CrossRefGoogle Scholar
Krivanek, O.L., Nellist, P.D., Dellby, N., Murfitt, M., Szilagyi, Z., Ultramicroscopy 96, 229 (2003).CrossRefGoogle Scholar
Haider, M., Uhlemann, S., Zach, J., Ultramicroscopy 81, 163 (2000).CrossRefGoogle Scholar
Erni, R., Rossell, M.D., Kisielowski, C., Dahmen, U., Phys. Rev. Lett. 102, 96101 (2009).CrossRefGoogle Scholar
Sawada, H., Tanishiro, Y., Ohashi, N., Tomita, T., Hosokawa, F., Kaneyama, T., Kondo, Y., Takayanagi, K., J. Electron Microsc. 58, 357 (2009).CrossRefGoogle Scholar
Krivanek, O.L., Chisholm, M.F., Nicolosi, V., Pennycook, T.J., Corbin, G.J., Dellby, N., Murfitt, M.F., Own, C.S., Szilagyi, Z.S., Oxley, M.P., Pantelides, S.T., Pennycook, S.J., Nature 464, 571 (2010).CrossRefGoogle Scholar
Krivanek, O.L., Dellby, N., Murfitt, M.F., Chisholm, M.F., Pennycook, T.J., Suenaga, K., Nicolosi, V., Ultramicroscopy 110, 935 (2010).CrossRefGoogle Scholar
Suenaga, K., Koshino, M., Nature 468, 1088 (2010).CrossRefGoogle Scholar
Zhou, W., Lee, J., Nanda, J., Pantelides, S.T., Pennycook, S.J., Idrobo, J.-C., Nat. Nanotechnol. 7, 161 (2012).CrossRefGoogle Scholar
Lee, J., Zhou, W., Idrobo, J.C., Pennycook, S.J., Pantelides, S.T., Phys. Rev. Lett. 107, 85507 (2011).CrossRefGoogle Scholar
Chung, S., Choi, S., Yamamoto, T., Ikuhara, Y., Phys. Rev. Lett. 100, 125502 (2008).CrossRefGoogle Scholar
Pennycook, S.J., in Scanning Transmission Electron Microscopy, Pennycook, S.J., Nellist, P.D., Eds. (Springer, New York, 2011), pp. 1–90.CrossRefGoogle ScholarPubMed
Varela, M., Gazquez, J., Pennycook, S.J., MRS Bull. 37, 29 (2012).CrossRefGoogle Scholar
Bals, S.S., Van Aert, S.S., Romero, C.P.C., Lauwaet, K.K., Van Bael, M.J.M., Schoeters, B.B., Partoens, B.B., Yücelen, E.E., Lievens, P.P., Van Tendeloo, G.G., Nat. Commun. 3, 897 (2012).CrossRefGoogle Scholar
Warner, J.H., Margine, E.R., Mukai, M., Robertson, A.W., Giustino, F., Kirkland, A.I., Science 337, 209 (2012).CrossRefGoogle Scholar
Pennycook, T.J., McBride, J.R., Rosenthal, S.J., Pennycook, S.J., Pantelides, S.T., Nano Lett. 12, 3038 (2012).CrossRefGoogle Scholar
Pennycook, S.J., Scanning 30, 287 (2008).CrossRefGoogle ScholarPubMed
Zagonel, L., Mazzucco, S., Tencé, M., March, K., Bernard, R., Laslier, B., Jacopin, G., Tchernycheva, M., Rigutti, L., Julien, F., Nano Lett. 11, 568 (2011).CrossRefGoogle Scholar
Parent, L.R., Robinson, D.B., Woehl, T.J., Ristenpart, W.D., Evans, J.E., Browning, N.D., Arslan, I., ACS Nano 6 3589 (2012).CrossRefGoogle Scholar
De Jonge, N., Ross, F.M., Nature Nanotech. 6, 695 (2011).CrossRefGoogle Scholar
Verbeeck, J., Tian, H., Béché, A., Ultramicroscopy 113, 83 (2012).CrossRefGoogle Scholar
Krivanek, O.L., Ursin, J.P., Bacon, N.J., Corbin, G.J., Dellby, N., Hrncirik, P., Murfitt, M.F., Own, C.S., Szilagyi, Z.S., Phil. Trans. R. Soc. A, 367, 3683 (2009).CrossRefGoogle Scholar