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A Low-Voltage and High Uniformity NEMS Tunable Color Filter Based on Subwavelength Grating

Published online by Cambridge University Press:  09 August 2012

Hiroaki Honma
Affiliation:
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempakucho, Toyohashi, Aichi 441-8580, Japan
Kazuhiro Takahashi
Affiliation:
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempakucho, Toyohashi, Aichi 441-8580, Japan JST-CREST, Tokyo, Japan
Makoto Ishida
Affiliation:
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempakucho, Toyohashi, Aichi 441-8580, Japan Electronics-Inspired Interdisciplinary Research Institute, Toyohashi University of Technology
Kazuaki Sawada
Affiliation:
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempakucho, Toyohashi, Aichi 441-8580, Japan JST-CREST, Tokyo, Japan Electronics-Inspired Interdisciplinary Research Institute, Toyohashi University of Technology
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Abstract

This paper reports a NEMS (Nano Electro Mechanical Syetems) tunable color filter based on subwavelength grating with high color uniformity and low drive voltage. We newly proposed a GVG (Ground-Voltage-Ground) type tunable color filter deployed with a parallel-plate actuator with three pairs of electrode to decrease a crosstalk of an electrostatic attraction force between each actuator. The proposed structure was fabricated using an SOI wafer. The color tuning using was demonstrated by applying the drive voltage of 6.7 V. The reflected light intensity was decreased by 34 % at 680 nm wavelength. The color uniformity was also obtained in the filter area by reducing the variation of the displacement on one-dimensional arrayed actuators.

Type
Articles
Copyright
Copyright © Materials Research Society 2012

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References

REFERENCES

1. Wang, S.S. and Magnusson, R., “Theory and applications of guided-mode resonance filters,” Applied Optics, vol. 32, no. 14, pp. 26062613 (1993)Google Scholar
2. Liu, Z.S., Tibuleac, S., Shin, D., Young, P.P., and Magnusson, R., “High-efficiency guided-mode resonance filter,” Optics Letters, vol. 23, no. 19, pp. 15561558 (1998)Google Scholar
3. Kanamori, Y., Shimono, M., and Hane, K., “Fabrication of transmission color filters using silicon subwavelength gratings on quartz substrates,” IEEE Photonics Technology Letters, vol. 18, no.20, pp. 21262128 (2006)Google Scholar
4. Kanamori, Y., Katsube, H., Furuta, T., Hasegawa, S., and Hane, K., J. J. Appplied Physics, 48, 06FH04, (2009)Google Scholar
5. Isamoto, K., Morosawa, A., Tei, M., Fujita, H., and Toshiyoshi, H., “A 5-volt operated MEMS variable optical attenuator by SOI bulk micromachining,” IEEE J. Selected Topics in Quantum Elec., vol. 10, no. 3, pp. 570578 (2004)Google Scholar
6. Yamanoi, T., Endo, T., and Toshiyoshi, H., “A hybrid-assembled MEMS Fabry-Perot wavelength tunable filter,” Sensors and Actuators A, 145 146, pp. 116122 (2007)Google Scholar
7. Zhang, X. M., Zhao, Q. W., Zhong, T., Yu, A. B., Khoo, E. H., Lu, C., Liu, A. Q., Proc. Tranceducers & Eurosensors ’07, June. 10-14, 2007, Lyon, France, pp.24172420 (2007)Google Scholar
8. Hane, K., Kobayashi, T., Hu, F. R., and Kanamori, Y., “Variable optical reflectance of a self-supported Si grating,” Applied Physics Letters, vol. 88, p. 141109 (2006)Google Scholar
9. Miyao, H., Takahashi, K., Ishida, M., and Sawada, K., “A Tunable Color Filter Using Sub-micron Grating Integrated with Electrostatic Actuator Mechanism,” 219 th ECS Meeting, 1-6 May, 2011, Montreal, Canada, pp. 213218 (2011)Google Scholar
10. Honma, H., Miyao, H., Takahashi, K., Futagawa, M., Dasai, F., Ishida, M., and Sawada, K., “Monolithic Integration of NEMS Tunable Color Filter and LSI Driver Circuits,” Proc. 16th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS ’11), 5-9 June, 2011, Beijing, China, pp. 29282931(2011)Google Scholar