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Porous Silicon Coated with Ultra-Thin Diamond-Like Carbon Film Cathodes

Published online by Cambridge University Press:  17 March 2011

Anatoli A. Evtukh ,
Volodimir G. Litovchenko ,
Yurii M. Litvin ,
Dmitrii V. Fedin ,
Yurii V. Rassamakin ,
Andrey V. Sarikov ,
Andrei G. Chakhovskoi ,
Charles E. Hunt  and
Thomas E. Felter
Anatoli A. Evtukh
Affiliation:
Institute of Semiconductor Physics, 45 Prospekt Nauki, Kiev 03028, UKRAINE
Volodimir G. Litovchenko
Affiliation:
Institute of Semiconductor Physics, 45 Prospekt Nauki, Kiev 03028, UKRAINE
Yurii M. Litvin
Affiliation:
Institute of Semiconductor Physics, 45 Prospekt Nauki, Kiev 03028, UKRAINE
Dmitrii V. Fedin
Affiliation:
Institute of Semiconductor Physics, 45 Prospekt Nauki, Kiev 03028, UKRAINE
Yurii V. Rassamakin
Affiliation:
Institute of Semiconductor Physics, 45 Prospekt Nauki, Kiev 03028, UKRAINE
Andrey V. Sarikov
Affiliation:
Institute of Semiconductor Physics, 45 Prospekt Nauki, Kiev 03028, UKRAINE
Andrei G. Chakhovskoi
Affiliation:
ECE Department, University of California, Davis, CA 95616, USA
Charles E. Hunt
Affiliation:
ECE Department, University of California, Davis, CA 95616, USA
Thomas E. Felter
Affiliation:
Lawrence Livermore National Laboratory, Livermore, USA
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Abstract

The main requirements to electron field emission cathodes are their efficiency, stability and uniformity. In this work we combined the properties of porous silicon layers and diamond-like carbon (DLC) film to obtain emission cathodes with improved parameters. The layered structures of porous silicon and DLC film were formed both on flat n-Si surface and silicon tips created by chemical etching. The conditions of the anodic and stain etching of silicon in HF containing solution under the illumination have been widely changed. The influence of thin (≤10nm) DLC film coating of the porous silicon layer on electron emission has been investigated. The parameters of emission efficiency such as field enhancement coefficient, effective emission areas and threshold voltages have been estimated from current-voltage dependencies to compare and characterize different layered structures. The improvement of the emission efficiency of silicon tip arrays with porous layers coated with thin DLC film has been observed. These silicon-based structures are promising for flat panel display applications.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 685: Symposium D – Advanced Materials and Devices for Large-Area Electronics , 2001 , D15.4.1
Copyright
Copyright © Materials Research Society 2001

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References

1. Jessing, J.R., Parker, D.L., Weichold, M.H., J. Vac. Sci. Technol., B14(3), 1899 (1996).Google Scholar
2. Boswell, E.C., Huang, M., Smith, C.D.W., Wislow, P.R., J. Vac. Sci. Technol., B14(3), 1895 (1996).Google Scholar
3. Boswell, E.C., Seonp, T.Y., Wilshow, P.R., J. Vac. Sci. Technol., B13, 437 (1995).Google Scholar
4. Takai, M., Yamashita, M., Wille, H., Yuro, S., Haribata, S., Ototake, M., Appl. Phys. Lett., 66, 422 (1995).Google Scholar
5. Kleps, I., Nicolaescu, D., Lungu, C., Musa, G., Postan, C., Caccavale, F., Appl. Sur. Sci., 111, 228 (1997).Google Scholar
6. Litovchenko, V.G., Evtukh, A.A., Marchenko, R.I., Klyui, N.I., Seminovich, V.A., J. Micromech. Microeng., 7, 1 (1997).Google Scholar
7. Harvey, R.J., Lee, R.A., Miller, A.J., Wigmore, J.K., IEEE Trans. Electron. Dev., 38, 2323 (1991).Google Scholar
8. Groning, O., Kuttel, O.M., Groning, I., Schlapbach, L., Appl. Sur. Sci., 111, 135 (1997).Google Scholar
9. Evtukh, A.A., Litovchenko, V.G., Klyui, N.I., Marchenko, R.I., Kudzinovski, S.Yu., J. Vac. Sci. Technol., B17(2), 679 (1999).Google Scholar
10. Searson, P.C., Appl. Phys. Lett., 59, 832 (1991).Google Scholar
11. Dimova–Malinovska, D., Senolova–Vassileva, M., Trenov, N., Kamenova, M., Thin Solid Films, 297, 9 (1997).Google Scholar
12. Branston, D.W., Stephani, D., IEEE Trans. Electron. Dev., ED–38, 2329 (1991).Google Scholar
13. Brodie, I., Spindt, C.A., Adv. Electr. and Electr. Dev., 83, 1 (1996).Google Scholar