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Preparation and Characterization of Ion Beam Assisted Aluminum Oxide Films

Published online by Cambridge University Press:  25 February 2011

James K. Hirvonen ,
T.G. Tetreault ,
G. Parker ,
P. Revesz ,
D. Land ,
J. Price ,
D. Simons  and
S. Stern
James K. Hirvonen
Affiliation:
Spire Corporation, Patriots Park, Bedford, MA 01730
T.G. Tetreault
Affiliation:
Spire Corporation, Patriots Park, Bedford, MA 01730
G. Parker
Affiliation:
Spire Corporation, Patriots Park, Bedford, MA 01730
P. Revesz
Affiliation:
Mat. Sci. Dept., Bard Hall, Cornell University, Ithaca, N.Y. 14853
D. Land
Affiliation:
NSWC, White Oak Laboratory, Silver Spring, MD 20903
J. Price
Affiliation:
NSWC, White Oak Laboratory, Silver Spring, MD 20903
D. Simons
Affiliation:
NSWC, White Oak Laboratory, Silver Spring, MD 20903
S. Stern
Affiliation:
NSWC, White Oak Laboratory, Silver Spring, MD 20903
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Abstract

The ion beam assisted deposition (IBAD) technique has been employed to make aluminum oxide optical coatings. Deposition variables include aluminum oxide evaporant to oxygen ion beam flux ratios, substrate temperature, and ion energy. Characterization included optical ellipsometry, ion beam analysis, and adhesion tests. Films deposited with the aid of ions exhibited the highest refractive indices and best adhesion to their substrates.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 157: Symposium A – Beam-Solid Interactions: Physical Phenomena , 1989 , 13
Copyright
Copyright © Materials Research Society 1990

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References

REFERENCES

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