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Thermal Activation of the Crystallization Kinetics of Amorphous Silicon

Published online by Cambridge University Press:  21 February 2011

T. Mohammed-Brahim ,
D. Briand ,
K. Kis-Sion ,
D. Guillet ,
A.C. Salaün  and
O. Bonnaud
T. Mohammed-Brahim
Affiliation:
GMV URA-CNRS 1648 Université Rennes I, Campus de Beaulieu, 35042 Rennes Cedex, France
D. Briand
Affiliation:
GMV URA-CNRS 1648 Université Rennes I, Campus de Beaulieu, 35042 Rennes Cedex, France
K. Kis-Sion
Affiliation:
GMV URA-CNRS 1648 Université Rennes I, Campus de Beaulieu, 35042 Rennes Cedex, France
D. Guillet
Affiliation:
GMV URA-CNRS 1648 Université Rennes I, Campus de Beaulieu, 35042 Rennes Cedex, France
A.C. Salaün
Affiliation:
GMV URA-CNRS 1648 Université Rennes I, Campus de Beaulieu, 35042 Rennes Cedex, France
O. Bonnaud
Affiliation:
GMV URA-CNRS 1648 Université Rennes I, Campus de Beaulieu, 35042 Rennes Cedex, France
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Abstract

Solid Phase Crystallization of amorphous silicon films, deposited by the Low Pressure Chemical Vapor Deposition technique, is studied by in-situ monitoring the film conductance. The crystal growth rate VG, deduced from this measurement, was found to be thermally activated. The activation energy E behaviour for films with different doping varying in a great range, from undoped to 4×1019 cm−3, was then deduced. This behaviour, described for the first time in this work, shows a constant E for undoped and weak doping, then a high decrease after a doping value threshold. The undoped films show a decreasing E when the deposition rate increases i.e. when the structure of the amorphous deposited film tends to correspond to the relaxed amorphous network. All these new results are used to introduce a crystallization model based on a crystalline-amorphous double phase and on the charge of defects at the crystal-amorphous interface.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 398: Symposium C – Thermodynamics and Kinetics of Phase Transformations , 1995 , 387
Copyright
Copyright © Materials Research Society 1998

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References

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