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Transmission Electron Microscopy Study of Diamond Films Grown by Plasma Deposition

Published online by Cambridge University Press:  21 February 2011

M.S. Wong ,
W.A. Chiou ,
F.R. Chen ,
D.X. Li  and
R.P.H. Chang
M.S. Wong
Affiliation:
Materials Research Center, Northwestern University, Evanston, IL 60208
W.A. Chiou
Affiliation:
Materials Research Center, Northwestern University, Evanston, IL 60208
F.R. Chen
Affiliation:
Materials Research Center, Northwestern University, Evanston, IL 60208
D.X. Li
Affiliation:
Materials Research Center, Northwestern University, Evanston, IL 60208
R.P.H. Chang
Affiliation:
Materials Research Center, Northwestern University, Evanston, IL 60208
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Abstract

The morphology and crystal structure of diamond crystallites grown by radio frequency (RF) and microwave (MW) plasma enhanced chemical vapor deposition (PECVD) under comparable conditions are examined by electron microscopy and found to be a strong function of the plasma. A novel TEM sample preparation method is developed to examine the internal structure of diamond as well as interfacial structure between diamond and substrate by direct deposition of diamond crystallites on prethinned metal grids. The diamond crystallites grown by RF PECVD are highly defective and composed of nanocrystalline grains of random orientation while those grown by MW PECVD are wellfaceted and process near perfect long range order in crystal structure.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 139: Symposium R – High Resolution Microscopy of Materials , 1989 , 363
Copyright
Copyright © Materials Research Society 1989

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References

REFERENCES

1. Johnson, G.H., Badzian, A.R. and Geis, M.W., (Editors), Diamond and Diamond-like Materials Synthesis, (MRS, 1988).Google Scholar
2. DeVries, R.C., Annu. Rev. Mater. Sci., 17, 161 (1987).Google Scholar
3. Angus, J.C. and Hayman, C.C., Science, 241, 913 (1988).Google Scholar
4. Spear, K.E., Earth and Mineral Sciences 56 (4), 53 (1987), [Penn State Univ.].Google Scholar
5. Matsumoto, S. and Matsui, Y., J. Mat. Sci. 18, 1785 (1983).Google Scholar
6. Kawarada, H., Mar, K.S., Suzuki, J., Ito, T., Mori, H., Fujita, H. and Hiraki, A., Jap. J. Appl. Phys., 26(11), L1903 (1987).Google Scholar
7. Williams, B.E., Glass, T.P., Davis, R.F., Kobashi, K. and Kawate, Y., in Diamond and diamond-like Materials Synthesis, edited by Johnson, G.H., Badzian, A.R. and Geis, M.W., pp.59–62, (MRS, 1988),Google Scholar
8. Narayan, J. and Srivatsa, A.R., Peter, M., Yokota, S.and Ravi, K.V., Appl. Phys. Lett. 53(19), 1823 (1988).Google Scholar
9. Meilunas, R., Wong, M.S., Sheng, K.C., Ong, T.P. and Chang, R.P.H., ”The Initial Stages of Plasma Synthesis of Diamond Films”, MRS proceeding for Symposium B, Boston 1988, to be published.Google Scholar
10. Bazian, A., Simonton, B., Badzian, T., Messier, R., Spear, K.E. and Roy, R., SPIE, 683, 127 (1986).Google Scholar
11. Matsumoto, S., Sato, Y., Kamo, M. and Setaka, N., Jap. J Appl. Phys., 21(4), L183 (1982).Google Scholar
12. Suzuki, K., Sawabe, A., Yasuda, H. and Inuzuka, T., Appl. Phys. Lett., 50(12), 728 (1987).Google Scholar