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The Use of Fresnel Contrast to Study the Initial Stages of The in situ Oxidation of Silicon

Published online by Cambridge University Press:  25 February 2011

Frances M. Ross ,
J. Murray Gibson  and
W. M. Stobbs
Frances M. Ross
Affiliation:
University of Cambridge, Department of Materials Science and Metallurgy, Pembroke Street, Cambridge CB2 3QZ, U.K.
J. Murray Gibson
Affiliation:
AT&T Bell Laboratories, Murray Hill, NJ 07974
W. M. Stobbs
Affiliation:
University of Cambridge, Department of Materials Science and Metallurgy, Pembroke Street, Cambridge CB2 3QZ, U.K.
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Abstract

We describe the analysis of Fresnel contrast seen at a free silicon surface in order to characterise the initial clean surface and the formation in situ of the first atomic layers of oxide.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 159: Symposium C – Atomic Scale Structure of Interfaces , 1989 , 185
Copyright
Copyright © Materials Research Society 1990

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References

REFERENCES

1. McDonald, M. L., Gibson, J. M. and Unterwald, F. C., Rev. Sci. Instrum. 60, 700 (1989)Google Scholar
2. Gibson, J. M., McDonald, M. L. and Unterwald, F. C., Phys. Rev. Lett. 55, 1765 (1985)Google Scholar
3. Carriere, B., Chouiyakh, A and Land, B., Surf. Sci. 126, 495 (1983)Google Scholar
4. Saxton, W. O., Pitt, T. J. and Homer, M., Ultramic. 4, 343 (1979)Google Scholar
5. Ness, J. N., Stobbs, W. M. and Page, T. F., Phil. Mag. A 54, 679 (1986)Google Scholar
6. Heidenreich, R. D., Hess, W. M. and Ban, L. L., J. Appl. Cryst. 1, 1 (1968)Google Scholar
7. Fukushima, K., Kawakatsu, H. and Fukami, A., J. Phys. D 7, 257 (1974)Google Scholar
8. Ross, F. M. and Stobbs, W. M., submitted to Phil. Mag. A (1989)Google Scholar
9. Takayanagi, K., Tanishiro, Y., Takahashi, M. and Takahashi, S., J. Vac. Sci. and Tech. A 3, 1502 (1985)Google Scholar
10. Gibson, J. M., this conferenceGoogle Scholar
11. Carriere, B., Deville, J. P. and Maachi, A. El, Phil. Mag. B 55, 721 (1987)Google Scholar
12. Collot, P., Gautherin, G., Agius, B., Rigo, S. and Rochet, F., Phil. Mag. B 52, 1051 (1985)Google Scholar