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An Investigation of in Situ Chlorination of Tungsten

Published online by Cambridge University Press:  25 February 2011

N. Thomas ,
E. Blanquet ,
C. Vahlas ,
C. Bernard  and
R. Madar
N. Thomas
Affiliation:
Laboratoire de Thermodynamique et Physico-Chimie Métallurgiques, E.N.S.E.E.G, BP.75, 38402 Saint Martin d'Hères, France
E. Blanquet
Affiliation:
Laboratoire de Thermodynamique et Physico-Chimie Métallurgiques, E.N.S.E.E.G, BP.75, 38402 Saint Martin d'Hères, France
C. Vahlas
Affiliation:
Laboratoire de Thermodynamique et Physico-Chimie Métallurgiques, E.N.S.E.E.G, BP.75, 38402 Saint Martin d'Hères, France
C. Bernard
Affiliation:
Laboratoire de Thermodynamique et Physico-Chimie Métallurgiques, E.N.S.E.E.G, BP.75, 38402 Saint Martin d'Hères, France
R. Madar
Affiliation:
INPG - ENSPG, LMGP, BP.46, 38402 Saint Martin d'Hè1res, France
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Abstract

A thermodynamic and experimental study of in-situ chlorination of tungsten is presented. When gaseous tungsten chlorides are used as metal precursors for tungsten and tungsten silicide CVD, their direct synthesis provide a reproductible volatile chloride source.

The conditions leading to the best production of volatile tungsten chlorides have been optimized by means of thermodynamic calculations. The influence of the different production parameters (temperature, nature of reactant gas, …) have been determined.

During some chlorination experiments, volatile chlorides have been detected in-situ by a quadrupole mass spectrometer.

Good agreement between theoretical and experimental results is obtained.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 204: Symposium E – Chemical Perspectives of Microelectronic Materials II , 1990 , 451
Copyright
Copyright © Materials Research Society 1991

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References

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