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Carbon Local Bonding Configurations in Amorphous Hydrogenated Silicon-Carbon Alloys

Published online by Cambridge University Press:  26 February 2011

Mark A. Petrich  and
Jeffrey A. Reimer
Mark A. Petrich
Affiliation:
Department of Chemical Engineering, University of California, Berkeley, CA 94720-9989.
Jeffrey A. Reimer
Affiliation:
Department of Chemical Engineering, University of California, Berkeley, CA 94720-9989.
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Abstract

We present the results of a carbon-13 nuclear magnetic resonance (NMR) study of well-characterized thin films of amorphous hydrogenated silicon carbide. The NMR data detail the distribution of carbon local bonding configurations in films which have carbon-to-silicon ratios less than one. In particular, we show data which clearly identify and quantify non-hydrogenated sp2, or unsaturated, carbon bonding environments.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 95: Symposium E – Amorphous Silicon Semiconductors--Pure and Hydrogenated , 1987 , 329
Copyright
Copyright © Materials Research Society 1987

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