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Characterization of Plasma-Fluorinated Polypropylene and Polystyrene Surfaces by Static Sims

Published online by Cambridge University Press:  21 February 2011

W. J. Van Ooij
Affiliation:
Department of Chemistry and Geochemistry, Colorado School of Mines, Golden, CO 80401.
R. S. Michael
Affiliation:
Department of Chemistry and Geochemistry, Colorado School of Mines, Golden, CO 80401.
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Abstract

Static SIMS was used to characterize polypropylene and polystyrene films following exposure to SF 6 and C2F 6 plasmas. The predominant species which are incorporated into the polymer surfaces are fluorine atoms and CF 2 /CF 3 radicals, respectively.

Type
Research Article
Copyright
Copyright © Materials Research Society 1988

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References

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