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Chemical Processing and Properties of Nanocrystalline BaTiO3

Published online by Cambridge University Press:  25 February 2011

Z. Xu ,
H. K. Chae ,
M. H. Frey  and
D. A. Payne
Z. Xu
Affiliation:
Department of Materials Science and Engineering, Materials Research Laboratory and Beekman Institute, University of Illinois at Urbana-Champaign, Urbana, IL 61801
H. K. Chae
Affiliation:
Department of Materials Science and Engineering, Materials Research Laboratory and Beekman Institute, University of Illinois at Urbana-Champaign, Urbana, IL 61801
M. H. Frey
Affiliation:
Department of Materials Science and Engineering, Materials Research Laboratory and Beekman Institute, University of Illinois at Urbana-Champaign, Urbana, IL 61801
D. A. Payne
Affiliation:
Department of Materials Science and Engineering, Materials Research Laboratory and Beekman Institute, University of Illinois at Urbana-Champaign, Urbana, IL 61801
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Abstract

Barium titanate (BaTiO3) thin layers were prepared by sol-gel processing. Details are reported for the synthesis route from methoxyethoxide precursors. Partially hydrolyzed solutions were spin-cast onto metallized silicon substrates, and a multilayering technique was used to develop sub-micron structures. Information is reported on the thermal processing conditions used and the development of structure. Crystallization started at 600°C and was fully developed by 700°C. The room temperature structure was cubic, and the grain size was 25–50 nm. Details are reported for the dielectric properties. Ferroelectricity was not observed. Dielectric constant (200–300) increased with increasing grain size, and was stable with respect to temperature, field and frequency. The properties are attractive for potential integrated capacitor applications.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 271: Symposium N – Better Ceramics Through Chemistry V , 1992 , 339
Copyright
Copyright © Materials Research Society 1992

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References

REFERENCES

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