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The Chemistry of Boron and Titanium Diboride Formation: Decomposition of TiCl4 and BCl3 in Hydrogen and Helium*

Published online by Cambridge University Press:  10 February 2011

Thomas H. Osterheld
Affiliation:
Sandia National Laboratories, Mail Stop 9052 Livermore, CA 94551-0969
Mark D. Allendorf
Affiliation:
Sandia National Laboratories, Mail Stop 9052 Livermore, CA 94551-0969
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Abstract

Measurements of the decomposition of mixtures of boron trichloride (BCl3), titanium tetrachloride (TiCl4), and hydrogen at elevated temperatures are presented. The decomposition of BCl3 with hydrogen appears to drive the chemistry in this system. The species depositing boron on the surface contains at least 2 chlorine atoms. Once deposited, the surface chlorine is removed by reaction with hydrogen to form HCl and, presumably, surface B-H bonds.

Type
Research Article
Copyright
Copyright © Materials Research Society 1996

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References

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